A MEMS microphone inspired by Ormia for spatial sound detection
Presentation / Conference Contribution
Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F., & Uttamchandani, D. (2018, January). A MEMS microphone inspired by Ormia for spatial sound detection. Presented at 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK
This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two indi... Read More about A MEMS microphone inspired by Ormia for spatial sound detection.