A MEMS microphone inspired by Ormia for spatial sound detection

Zhang, Yansheng; Bauer, Ralf; Whitmer, William M.; Jackson, Joseph C.; Windmill, James F.C.; Uttamchandani, Deepak

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea's tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

Citation

Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F., & Uttamchandani, D. (2018). A MEMS microphone inspired by Ormia for spatial sound detection. In 2018 IEEE Micro Electro Mechanical Systems (MEMS). , (253-256). https://doi.org/10.1109/memsys.2018.8346532

• Conference Name: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
• Start Date: Jan 21, 2018
• End Date: Jan 25, 2018
• Acceptance Date: Apr 26, 2018
• Publication Date: Apr 26, 2018
• Deposit Date: Oct 22, 2018
• Publicly Available Date: Nov 1, 2018
• Publisher: Institute of Electrical and Electronics Engineers
• Pages: 253-256
• Book Title: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
• Chapter Number: n/a
• ISBN: 9781538647820
• DOI: https://doi.org/10.1109/memsys.2018.8346532
• Public URL: https://nottingham-repository.worktribe.com/output/1179013
• Publisher URL: https://ieeexplore.ieee.org/document/8346532
• Additional Information: © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.