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A MEMS microphone inspired by Ormia for spatial sound detection

Zhang, Yansheng; Bauer, Ralf; Whitmer, William M.; Jackson, Joseph C.; Windmill, James F.C.; Uttamchandani, Deepak

Authors

Yansheng Zhang

Ralf Bauer

William M. Whitmer

Joseph C. Jackson

James F.C. Windmill

Deepak Uttamchandani

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea's tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

Start Date Jan 21, 2018
Publication Date Apr 26, 2018
Publisher Institute of Electrical and Electronics Engineers
Pages 253-256
Book Title 2018 IEEE Micro Electro Mechanical Systems (MEMS)
Chapter Number n/a
ISBN 9781538647820
DOI https://doi.org/10.1109/memsys.2018.8346532
Publisher URL https://ieeexplore.ieee.org/document/8346532
Additional Information © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

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