Extracting focus variation data from coherence scanning interferometric measurements
(2024)
Journal Article
Liu, J., Hooshmand, H., Piano, S., Leach, R., Coupland, J., Ren, M., …Su, R. (2024). Extracting focus variation data from coherence scanning interferometric measurements. Precision Engineering, 88, 699-706. https://doi.org/10.1016/j.precisioneng.2024.04.016
Coherence scanning interferometry (CSI), based on the principle of interference, can achieve sub-nanometer precision for height measurements. On the other hand, focus variation microscopy (FVM), combining the small depth of field of the objective, is... Read More about Extracting focus variation data from coherence scanning interferometric measurements.