Evaluating approximate and rigorous scattering models in virtual coherence scanning interferometry for improved surface topography measurement
(2024)
Presentation / Conference Contribution
Hooshmand, H., Isa, M. A., Nikolaev, N., Piano, S., & Leach, R. (2024, August). Evaluating approximate and rigorous scattering models in virtual coherence scanning interferometry for improved surface topography measurement. Presented at Optical Manufacturing and Testing 2024, San Diego, USA
In optical metrology, the growing demand for accurate measurement technologies is driven by the increasing applications of three-dimensional (3D) microscopy and imaging. The advancement of these technologies relies on the modelling of the measurement... Read More about Evaluating approximate and rigorous scattering models in virtual coherence scanning interferometry for improved surface topography measurement.