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TEM study on the electrical discharge machined surface of single-crystal silicon (2013)
Journal Article
Murray, J., Fay, M., Kunieda, M., & Clare, A. (2013). TEM study on the electrical discharge machined surface of single-crystal silicon. Journal of Materials Processing Technology, 213(5), https://doi.org/10.1016/j.jmatprotec.2012.11.028

EDM is a useful process for machining high-aspect ratio features with good accuracy in electrically conductive materials irrespective of their mechanical properties. With the ability of micro-EDM to compete with the resolution of conventional semi-co... Read More about TEM study on the electrical discharge machined surface of single-crystal silicon.