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TEM study on the electrical discharge machined surface of single-crystal silicon

Murray, J.W.; Fay, M.W.; Kunieda, M.; Clare, A.T.

Authors

J.W. Murray epxjm2@nottingham.ac.uk

M. Kunieda kunieda@edm.t.u-tokyo.ac.jp

A.T. Clare adam.clare@nottingham.ac.uk



Abstract

EDM is a useful process for machining high-aspect ratio features with good accuracy in electrically conductive materials irrespective of their mechanical properties. With the ability of micro-EDM to compete with the resolution of conventional semi-conductor processing techniques, the process has attracted interest for the potential machining of single-crystal silicon. In order for the process to be feasible, the damage mechanism occurring during machining must be characterised to assess the need for secondary processing. Despite this the microstructural transformations induced by the process on the surface of the workpiece have not yet been assessed. In this study transmission electron microscopy (TEM) and laser-Raman spectroscopy are employed to characterise the microstructural changes as well as the presence of any contaminants and defects at the nano-scale. A twinned-crystalline structure created by epitaxial growth is formed in the recast layer. Some amorphous phase is also present. Findings indicate sub-surface pores between 10 nm and 200 nm diameter formed by gas expansion are observed. If the formation of such pores can be generalised for EDM processing of other materials, this phenomenon may contribute to the reduced mechanical integrity of such machined surfaces. Significant tool electrode material deposition with crystals of down to 3 nm diameter also occurred in the workpiece surface. The nano-scale of embedded material may have implications for the progress of electrical discharge machining as a coating process and the properties of such coatings.

Journal Article Type Article
Publication Date May 1, 2013
Journal Journal of Materials Processing Technology
Print ISSN 0924-0136
Electronic ISSN 0924-0136
Publisher Elsevier
Peer Reviewed Peer Reviewed
Volume 213
Issue 5
APA6 Citation Murray, J., Fay, M., Kunieda, M., & Clare, A. (2013). TEM study on the electrical discharge machined surface of single-crystal silicon. Journal of Materials Processing Technology, 213(5), doi:10.1016/j.jmatprotec.2012.11.028
DOI https://doi.org/10.1016/j.jmatprotec.2012.11.028
Keywords EDM, Single crystal silicon, TEM, Raman, Deposition,Recast layer
Publisher URL http://www.sciencedirect.com/science/article/pii/S0924013612003536#
Copyright Statement Copyright information regarding this work can be found at the following address: http://creativecommons.org/licenses/by/4.0

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Copyright Statement
Copyright information regarding this work can be found at the following address: http://creativecommons.org/licenses/by/4.0





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