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Effects of defocus on the transfer function of coherence scanning interferometry

Su, Rong; Thomas, Matthew; Leach, Richard; Coupland, Jeremy

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Authors

Rong Su

Matthew Thomas

Jeremy Coupland



Abstract

Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This paper extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI.

Citation

Su, R., Thomas, M., Leach, R., & Coupland, J. (2017). Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43(1), https://doi.org/10.1364/OL.43.000082

Journal Article Type Article
Acceptance Date Nov 6, 2017
Publication Date Dec 21, 2017
Deposit Date Nov 20, 2017
Publicly Available Date Dec 21, 2017
Journal Optics Letters
Print ISSN 0146-9592
Electronic ISSN 1539-4794
Publisher Optical Society of America
Peer Reviewed Peer Reviewed
Volume 43
Issue 1
DOI https://doi.org/10.1364/OL.43.000082
Public URL https://nottingham-repository.worktribe.com/output/901662
Publisher URL https://www.osapublishing.org/ol/abstract.cfm?uri=ol-43-1-82

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