Physics-based virtual coherence scanning interferometer for surface measurement
(2021)
Journal Article
Su, R., & Leach, R. (2021). Physics-based virtual coherence scanning interferometer for surface measurement. Light: Science and Applications, 2(2), 120-135. https://doi.org/10.37188/lam.2021.009
Virtual instruments provide task-specific uncertainty evaluation in surface and dimensional metrology. We demonstrate the first virtual coherence scanning interferometer that can accurately predict the results from measurements of surfaces with compl... Read More about Physics-based virtual coherence scanning interferometer for surface measurement.