An investigation on thermoelastic damping of high-Q ring resonators
(2015)
Journal Article
Hossain, S. T., McWilliam, S., & Popov, A. A. (2016). An investigation on thermoelastic damping of high-Q ring resonators. International Journal of Mechanical Sciences, 106, 209-219. https://doi.org/10.1016/j.ijmecsci.2015.12.023
For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of desig... Read More about An investigation on thermoelastic damping of high-Q ring resonators.