Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots
(2015)
Journal Article
Vladov, N., Segal, J., & Ratchev, S. (2015). Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures, 33, Article 041803. https://doi.org/10.1116/1.4926388
In this paper the new term apparent beam size of Focused Ion Beam (FIB) is introduced and an original method of its evaluation is demonstrated. Traditional methods of measuring the beam size, like the knife edge method, provide information about the... Read More about Apparent beam size definition of focused ion beams based on scanning electron microscopy images of nanodots.