Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN
Book Chapter
Fay, M. W., Harrison, I., Birbeck, J., Hughes, B., Uren, M., Martin, T., & Brown, P. D. Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN. In M. Aindow, & C. Kiely (Eds.), Electron microscopy and analysis 2001: proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference, University of Dundee, 5-7 September. IOP Publishing Ltd
Ti/Al/Ti/Au and Ti/Al/Pd/Au contacts to AlGaN/GaN have been investigated to ascertain the effect of annealing temperature on the structural evolution of the contacts. Ti/Al/Ti/Au contacts become ohmic after rapid thermal annealing at 750°C or higher,... Read More about Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN.