Applying machine learning to optical metrology: a review
(2024)
Journal Article
Xue, R., Hooshmand, H., Isa, M., Piano, S., & K Leach, R. (2024). Applying machine learning to optical metrology: a review. Measurement Science and Technology, 36(1), Article 012002. https://doi.org/10.1088/1361-6501/ad7878
This literature review investigates the integration of machine learning (ML) into optical metrology, unveiling enhancements in both efficiency and effectiveness of measurement processes. With a focus on phase demodulation, unwrapping, and phase-to-he... Read More about Applying machine learning to optical metrology: a review.