Surface measuring coherence scanning interferometry beyond the specular reflection limit
(2021)
Journal Article
Thomas, M., Su, R., de Groot, P., Coupland, J., & Leach, R. (2021). Surface measuring coherence scanning interferometry beyond the specular reflection limit. Optics Express, 29(22), 36121-36131. https://doi.org/10.1364/OE.435715
The capability of optical surface topography measurement methods for measurement of steep and tilted surfaces is investigated through modelling of a coherence scanning interferometer. Of particular interest is the effect on the interference signal an... Read More about Surface measuring coherence scanning interferometry beyond the specular reflection limit.