Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications
(2018)
Journal Article
Mohammad, A. E. K., Hong, J., Wang, D., & Guan, Y. (2019). Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications. Robotics and Computer-Integrated Manufacturing, 55(Part A), 65-75. https://doi.org/10.1016/j.rcim.2018.07.005
In this paper, we present a novel design of a robotic electrochemical mechanical polishing (ECMP) process. Firstly, the process is presented to replace the conventional ECMP process by a robotic-based one. The advantage of using industrial robots lie... Read More about Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications.