Electrostatic Nonlinear Trimming of Ring-Based MEMS Coriolis Vibrating Gyroscopes

Arifin, Davin J; Mcwilliam, Stewart

Abstract

The effects of electrostatic nonlinearity on rate measuring performance of a capacitive MEMS Coriolis Vibrating Gyroscope (CVG) with an imperfect sensing element are investigated. The electrostatic nonlinearity is a result of large amplitude vibration of the ring, which modifies the capacitive forcing and induces self-induced parametric amplification. A cubic-order nonlinear mathematical model is used to describe the electrostatic nonlinearity and expressions are developed for the scale factor and bias. It is shown that parametric pumping induces an amplification range that enhances rate sensitivity and electrostatic non-linearity has potential to negate the effects of imperfection.

Citation

Arifin, D. J., & Mcwilliam, S. (2022, July). Electrostatic Nonlinear Trimming of Ring-Based MEMS Coriolis Vibrating Gyroscopes. Presented at 10th European Nonlinear Dynamics Conference (ENOC 2022), Lyon, France

• Presentation Conference Type: Edited Proceedings
• Conference Name: 10th European Nonlinear Dynamics Conference (ENOC 2022)
• Start Date: Jul 17, 2022
• End Date: Jul 22, 2022
• Publication Date: 2022
• Deposit Date: Nov 14, 2024
• Publicly Available Date: Nov 14, 2024
• Peer Reviewed: Peer Reviewed
• Public URL: https://nottingham-repository.worktribe.com/output/41908780
• Publisher URL: https://enoc2020.sciencesconf.org/340695
• Additional Information: Originally planned for July 2020.