Validated physical models and parameters of bulk 3C-SiC aiming for credible technology computer aided design (TCAD) simulation
(2017)
Journal Article
Arvanitopoulos, A., Lophitis, N., Gyftakis, K. N., Perkins, S., & Antoniou, M. (2017). Validated physical models and parameters of bulk 3C-SiC aiming for credible technology computer aided design (TCAD) simulation. Semiconductor Science and Technology, 32(10), https://doi.org/10.1088/1361-6641/aa856b
© 2017 IOP Publishing Ltd. The cubic form of SiC (β- or 3C-) compared to the hexagonal α-SiC polytypes, primarily 4H- and 6H-SiC, has lower growth cost and can be grown heteroepitaxially in large area silicon (Si) wafers which makes it of special int... Read More about Validated physical models and parameters of bulk 3C-SiC aiming for credible technology computer aided design (TCAD) simulation.