Thickness measurement of polymer thin films with high frequency ultrasonic transducers
(2019)
Journal Article
Smith, R. J., Cavera, S. L., Pérez-Cota, F., Marques, L., & Clark, M. (2019). Thickness measurement of polymer thin films with high frequency ultrasonic transducers. AIP Conference Proceedings, 2102(1), 040015-1–040015-6. https://doi.org/10.1063/1.5099765
© 2019 Author(s). In this paper we present a method for characterizing the thickness, and more interestingly, the variation of thickness in polymer thin films (