Development of a compact focus variation microscopy sensor for on-machine surface topography measurement
(2021)
Journal Article
Santoso, T., Syam, W. P., Darukumalli, S., & Leach, R. (2022). Development of a compact focus variation microscopy sensor for on-machine surface topography measurement. Measurement, 187, Article 110311. https://doi.org/10.1016/j.measurement.2021.110311
On-machine areal surface topography measuring instruments are required for fast and accurate measurement of parts inside production machines without reducing production rates. This paper presents the design and development of a compact focus variatio... Read More about Development of a compact focus variation microscopy sensor for on-machine surface topography measurement.