Imaging beyond the fundamental slope limit in surface metrology using fluorophore-aided scattering microscopy
(2018)
Presentation / Conference
Liu, J., Liu, C., Li, L., Su, R., & Leach, R. (2018, November). Imaging beyond the fundamental slope limit in surface metrology using fluorophore-aided scattering microscopy. Paper presented at Special Interest Group Meeting: Structured & Freeform Surfaces
Topography measurement for smooth surfaces with high slopes, e.g. freeform optics, is a challenging task for optical measuring instruments as the light reflected by the tilted surface cannot be sufficiently collected by the objective, resulting in lo... Read More about Imaging beyond the fundamental slope limit in surface metrology using fluorophore-aided scattering microscopy.