Virtual optical instrument for uncertainty evaluation in surface topography measurement
(2023)
Presentation / Conference
Hooshmand, H., Pappas, A., Su, R., Leach, R., & Piano, S. (2023, September). Virtual optical instrument for uncertainty evaluation in surface topography measurement. Paper presented at 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2023), Seoul, South Korea
Uncertainty evaluation for optical techniques measuring surfaces with complex topography is an open issue in industrial metrology. The ISO standard framework attempts to simplify calibration and uncertainty evaluation by introducing a fixed set of me... Read More about Virtual optical instrument for uncertainty evaluation in surface topography measurement.