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Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit (2020)
Journal Article
Thomas, M., Su, R., de Groot, P., & Leach, R. (2020). Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit. Proceedings of SPIE, 11352, Article 1135207. https://doi.org/10.1117/12.2554568

Engineered functional surfaces often feature varying slopes on macro- and micro-scales. When surfaces are mirror-like, the highest surface slope that can be measured by a far-field 3D imaging optical surface measuring instrument is the arcsine of the... Read More about Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit.

Modeling of interference microscopy beyond the linear regime (2020)
Journal Article
Thomas, M., Su, R., Nikolaev, N., Coupland, J., & Leach, R. (2020). Modeling of interference microscopy beyond the linear regime. Optical Engineering, 59(3), https://doi.org/10.1117/1.oe.59.3.034110

Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in advanced manufacturing industry providing high-accuracy surface topography measurement. Enhancement of the metrological capability of CSI for... Read More about Modeling of interference microscopy beyond the linear regime.

Lens aberration compensation in interference microscopy (2020)
Journal Article
Su, R., Thomas, M., Liu, M., Drs, J., Bellouard, Y., Pruss, C., …Leach, R. (2020). Lens aberration compensation in interference microscopy. Optics and Lasers in Engineering, 128, Article 106015. https://doi.org/10.1016/j.optlaseng.2020.106015

Emergence of products that feature functional surfaces with complex geometries, such as freeform optics in consumer electronics and augmented reality and virtual reality, requires high-accuracy non-contact surface measurement. However, large discrepa... Read More about Lens aberration compensation in interference microscopy.

High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy (2019)
Journal Article
Su, R., Thomas, M., Liu, M., Coupland, J., & Leach, R. (2019). High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy. Proceedings of SPIE, 11102, Article 1110205. https://doi.org/10.1117/12.2528911

Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to ch... Read More about High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy.

Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method (2019)
Journal Article
Thomas, M., Su, R., Nikolaev, N., Coupland, J., & Leach, R. (2019). Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method. Proceedings of SPIE, 11057, 1-12. https://doi.org/10.1117/12.2526015

Coherence scanning interferometry (CSI) is a well-established technique for measuring surface topography based on the coherence envelope and phase of interference fringes. The most commonly used surface reconstruction methods, i.e. frequency domain a... Read More about Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method.

Effects of defocus on the transfer function of coherence scanning interferometry (2017)
Journal Article
Su, R., Thomas, M., Leach, R., & Coupland, J. (2017). Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43(1), https://doi.org/10.1364/OL.43.000082

Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces... Read More about Effects of defocus on the transfer function of coherence scanning interferometry.