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A MEMS microphone inspired by Ormia for spatial sound detection (2018)
Conference Proceeding
Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F., & Uttamchandani, D. (2018). A MEMS microphone inspired by Ormia for spatial sound detection. In 2018 IEEE Micro Electro Mechanical Systems (MEMS), 253-256. doi:10.1109/memsys.2018.8346532

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two indi... Read More