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High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy (2019)
Journal Article
Su, R., Thomas, M., Liu, M., Coupland, J., & Leach, R. (2019). High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy. Proceedings of SPIE, 11102, Article 1110205. https://doi.org/10.1117/12.2528911

Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to ch... Read More about High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy.

Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method (2019)
Journal Article
Thomas, M., Su, R., Nikolaev, N., Coupland, J., & Leach, R. (2019). Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method. Proceedings of SPIE, 11057, 1-12. https://doi.org/10.1117/12.2526015

Coherence scanning interferometry (CSI) is a well-established technique for measuring surface topography based on the coherence envelope and phase of interference fringes. The most commonly used surface reconstruction methods, i.e. frequency domain a... Read More about Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method.