High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy
(2019)
Journal Article
Su, R., Thomas, M., Liu, M., Coupland, J., & Leach, R. (2019). High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy. Proceedings of SPIE, 11102, Article 1110205. https://doi.org/10.1117/12.2528911
Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to ch... Read More about High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy.