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Effects of defocus on the transfer function of coherence scanning interferometry (2017)
Journal Article
Su, R., Thomas, M., Leach, R., & Coupland, J. (2017). Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43(1), https://doi.org/10.1364/OL.43.000082

Coherence scanning interferometry (CSI) offers three dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements, and reduces... Read More about Effects of defocus on the transfer function of coherence scanning interferometry.