Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit
(2020)
Journal Article
Thomas, M., Su, R., de Groot, P., & Leach, R. (2020). Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit. Proceedings of SPIE, 11352, Article 1135207. https://doi.org/10.1117/12.2554568
Engineered functional surfaces often feature varying slopes on macro- and micro-scales. When surfaces are mirror-like, the highest surface slope that can be measured by a far-field 3D imaging optical surface measuring instrument is the arcsine of the... Read More about Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit.