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Structural and electrical characterization of AuPtAlTi ohmic contacts to AlGaN/GaN with varying annealing temperature and Al content

Fay, Mike W.; Han, Y.; Brown, Paul D.; Harrison, Ian; Hilton, K.P.; Munday, A.; Wallis, D.; Balmer, R.S.; Uren, M.J.; Martin, T.

Structural and electrical characterization of AuPtAlTi ohmic contacts to AlGaN/GaN with varying annealing temperature and Al content Thumbnail


Authors

Y. Han

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PAUL BROWN PAUL.BROWN@NOTTINGHAM.AC.UK
Professor of Materials Characterisation

Ian Harrison

K.P. Hilton

A. Munday

D. Wallis

R.S. Balmer

M.J. Uren

T. Martin



Abstract

The effect of varying annealing temperature and Al layer thickness on the structural and electrical characteristics of AuPtAlTi/AlGaN/GaN ohmic contact structures has been systematically investigated. The relationship between annealing temperature, Al content, interfacial microstructure, surface planarity and contact resistance is
examined. In particular, the presence of a detrimental low temperature Pt-Al reaction is identified. This is implicated in both the requirement for a higher Al:Ti ratio than is required for related AuPdAlTi contact schemes and through the degraded temperature dependent resistance behaviour of the annealed AuPtAlTi contacts.

Citation

Fay, M. W., Han, Y., Brown, P. D., Harrison, I., Hilton, K., Munday, A., …Martin, T. (2008). Structural and electrical characterization of AuPtAlTi ohmic contacts to AlGaN/GaN with varying annealing temperature and Al content. Journal of Applied Physics, 103(7), https://doi.org/10.1063/1.2890978

Journal Article Type Article
Publication Date Apr 1, 2008
Deposit Date Aug 31, 2011
Publicly Available Date Mar 28, 2024
Journal Journal of Applied Physics
Print ISSN 0021-8979
Electronic ISSN 0021-8979
Publisher American Institute of Physics
Peer Reviewed Not Peer Reviewed
Volume 103
Issue 7
DOI https://doi.org/10.1063/1.2890978
Keywords N-TYPE GAN
FIELD-EFFECT TRANSISTORS
THERMAL-STABILITY
RESISTANCE
TI
MICROSTRUCTURE
MULTILAYERS
PERFORMANCE
Public URL https://nottingham-repository.worktribe.com/output/704598
Publisher URL http://jap.aip.org/resource/1/japiau/v103/i7/p074501_s1
Additional Information Pre-print - originally submitted version (August 2007), prior to referee's comments and corrections.

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