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Optical measurement of surface topographies with transparent coatings

Feng, Xiaobing; Senin, Nicola; Su, Rong; Ramasamy, Suresh; Leach, Richard


Xiaobing Feng

Nicola Senin

Rong Su

Suresh Ramasamy


Manufacturers nowadays have access to state-of-the-art areal surface topography measurement instruments that allow investigation of surface topography at unprecedented levels of detail and over a wide range of scales. However, high value-added products have demanding requirements, pushing measurement technologies to their limits. Therefore, a deeper insight and more comprehensive understanding of performance and behaviour of current areal surface topography measurement solutions is often needed. In this work, we investigate and compare the results when measuring the same surface with different, state-of-the-art areal surface topography measurement solutions involving the principal optical technologies, notably focus variation microscopy, coherence scanning interferometry, imaging confocal microscopy and point autofocus instrument, operated using different set-ups. The test case is a highly engineered surface obtained through a sequence of mechanical and chemical surface modification processes. The surface has complex topographic formations at micrometre and sub-micrometre scales, and is characterised by the presence of a thin transparent layer, notoriously challenging for optical measurement. The topographies reconstructed from measurement are compared both in terms of visual appearance and texture parameters.


Feng, X., Senin, N., Su, R., Ramasamy, S., & Leach, R. (2019). Optical measurement of surface topographies with transparent coatings. Optics and Lasers in Engineering, 121, 261-270.

Journal Article Type Article
Acceptance Date Apr 23, 2019
Online Publication Date Apr 29, 2019
Publication Date 2019-10
Deposit Date May 22, 2019
Publicly Available Date May 22, 2019
Journal Optics and Lasers in Engineering
Print ISSN 0143-8166
Publisher Elsevier
Peer Reviewed Peer Reviewed
Volume 121
Pages 261-270
Keywords Mechanical Engineering; Electrical and Electronic Engineering; Atomic and Molecular Physics, and Optics; Electronic, Optical and Magnetic Materials
Public URL
Publisher URL
Additional Information This article is maintained by: Elsevier; Article Title: Optical measurement of surface topographies with transparent coatings; Journal Title: Optics and Lasers in Engineering; CrossRef DOI link to publisher maintained version:; Content Type: article; Copyright: © 2019 The Authors. Published by Elsevier Ltd.


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