Chemical Imaging of Buried Interfaces in Organic-Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Tiddia, Mariavitalia; Mihara, Ichiro; Seah, Martin P.; Trindade, Gustavo Ferraz; Kollmer, Felix; Roberts, Clive J.; Hague, Richard; Mula, Guido; Gilmore, Ian S.; Havelund, Rasmus

Abstract

Copyright © 2019 American Chemical Society. Organic-inorganic hybrid materials enable the design and fabrication of new materials with enhanced properties. The interface between the organic and inorganic materials is often critical to the device's performance; therefore, chemical characterization is of significant interest. Because the interfaces are often buried, milling by focused ion beams (FIBs) to expose the interface is becoming increasingly popular. Chemical imaging can subsequently be obtained using secondary-ion mass spectrometry (SIMS). However, the FIB milling process damages the organic material. In this study, we make an organic-inorganic test structure to develop a detailed understanding of the processes involved in FIB milling and SIMS imaging. We provide an analysis methodology that involves a "clean-up" process using sputtering with an argon gas cluster ion source to remove the FIB-induced damage. The methodology is evaluated for two additive manufactured devices, an encapsulated strain sensor containing silver tracks embedded in a polymeric material and a copper track on a flexible polymeric substrate created using a novel nanoparticle sintering technique.

Citation

Tiddia, M., Mihara, I., Seah, M. P., Trindade, G. F., Kollmer, F., Roberts, C. J., …Havelund, R. (2019). Chemical Imaging of Buried Interfaces in Organic-Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry. ACS Applied Materials and Interfaces, 11(4), 4500-4506. https://doi.org/10.1021/acsami.8b15091

• Journal Article Type: Article
• Acceptance Date: Jan 3, 2019
• Online Publication Date: Jan 3, 2019
• Publication Date: Jan 30, 2019
• Deposit Date: Mar 13, 2019
• Publicly Available Date: Mar 13, 2019
• Journal: ACS Applied Materials and Interfaces
• Print ISSN: 1944-8244
• Electronic ISSN: 1944-8252
• Publisher: American Chemical Society
• Peer Reviewed: Peer Reviewed
• Volume: 11
• Issue: 4
• Pages: 4500-4506
• DOI: https://doi.org/10.1021/acsami.8b15091
• Public URL: https://nottingham-repository.worktribe.com/output/1637012
• Publisher URL: https://pubs.acs.org/doi/10.1021/acsami.8b15091