Model-based defect detection on structured surfaces having optically unresolved features
(2015)
Journal Article
O’Connor, D., Henning, A. J., Sherlock, B., Leach, R., Coupland, J., & Giusca, C. L. (2015). Model-based defect detection on structured surfaces having optically unresolved features. Journal of Optics A: Pure and Applied Optics, 54(30), 8872-8877. https://doi.org/10.1364/AO.54.008872
In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational mode... Read More about Model-based defect detection on structured surfaces having optically unresolved features.