Electrostatic Nonlinear Trimming of Ring-Based MEMS Coriolis Vibrating Gyroscopes
(2022)
Presentation / Conference Contribution
Arifin, D. J., & Mcwilliam, S. (2022, July). Electrostatic Nonlinear Trimming of Ring-Based MEMS Coriolis Vibrating Gyroscopes. Presented at 10th European Nonlinear Dynamics Conference (ENOC 2022), Lyon, France
The effects of electrostatic nonlinearity on rate measuring performance of a capacitive MEMS Coriolis Vibrating Gyroscope (CVG) with an imperfect sensing element are investigated. The electrostatic nonlinearity is a result of large amplitude vibratio... Read More about Electrostatic Nonlinear Trimming of Ring-Based MEMS Coriolis Vibrating Gyroscopes.